Jan 20, 2020

Hydrogen Implantation in Germanium

Hydrogen implantation of germanium is a promising technique for layer transfer. However, both the implantation process, and subsequent heat treatment can create defects in the transferred layer, which detrimentally effect the performance of devices fabricated on these transferred layers. In this study, implanted Germanium wafers were given various anneals and analysed optically and by spreading resistance, to gain insight on the nature of such defects. GeOI layers were produced by thermal splitting of implanted germanium wafers bonded to sapphire handle substrates.


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